KUMASAN MEDIX CO., LTD.

Scribing Machine TEC-2005RM

Scribing Machine TEC-2005RM

Semi-Automatic Scribing Machine for 4-inch Wafers
DETAIL
Highly Rigid Design, High Throughput
Separate independent axes for tool, table, and camera.
Minimizes shaking at highspeed processing for a clean scribe line.
Also able to increase the speed in the condition settings.

Auto-alignment Feature
Our original image recognition system enables batch recognition for bar alignment.
Partial wafer mode with single chip recognition feature also included.

Air-controlled Tool Pressure Application
Allows for a stable application of pressure and consistent scribe depth.
Has an effect similar to air suspension which minimizes tool jumping.

Linear Servo Motors
Linear servo motors used to lessen vibrations from machine running.
Enables a more precise scribing.