- Intruduction
Apiste technology in PAU-AZ series (pricise refrigerant flow control, original algorithm, heaterless control)
has achieved great enegy saving performance and high accuracy temperature & humidity control and stability
of ±0.1℃/±0.5%RH.
of ±0.1℃/±0.5%RH.
- Application
1. Semiconductors Industries
a. Semiconductor front-end process_Photolithography: Exposure Machine、Spin Coater(6inch and 8inch)
b. Semiconductor back-end process: Mold Process、Prober
2. Electrical & Electronics: Printer、Electric Charge and Discharge Device
3. Metal Processing Transportation: Ultra Precision Machining Machine、Test Bench for Engine
4. Pharmaceutical, Food, Chemical Industries: Tableting Machine、Electronic Balance、Dispensation System