Air Floating Type Slit Coter
Features
1.High precision discharge pump
2.High precision nozzle
3.Applicable to high speed coating
4.Applicable to transfer robot
5.Safety cover with lock mechanism
6.Nozzle tip management unit
7.Automatic supply sysem of coationg liquid and cleaning liquid
8.Reduce comtact damage of substrate backside by air floating
9.No static electricity problem by air floating
10.Applicable to high speed throughput by continuous substrate input
11.Package deal with vacuum chamber dryer
12.Many delivery records
Air Floating Type Slit Coter
Gantry Slide Slit Coater
