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    Laser Cell Cutting

    The Laser Cell Cutter is a system that cuts the mother flexible sheet into cells during the flexible OLED manufacturing process.
    It consists of a front end that cuts the mother glass into cells and a rear end with pad peeling, cutting, and inspection functions. It increases productivity and operation rates, through its various processing and inspection functions. and minimizes the occurrence of defects.

    Flexible OLED Mother Flexible sheet Cutting System

    Automation system(Cutting, Auto Scrap, Peeling, etc.)

    Diversification inspection function(presence/absence of peeling,cutting size, etc.)

    Cell data and process data management functions
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    Gasketed Plate Heat Exchangers

    Gasketed plate heat exchangers for modern requirements
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    G5.5 Array Cassette(1300mmx1500mm)

    樹脂フレ-ムまたはSUSフレ-ムを使用、2列のBSにて基板撓みを少なくします。
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    Breaking Machine TEC-1228AL

    Fully Automatic Wafer Breaking Machine for 6-inch Wafers
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    Scribing Machine TEC-2005RM

    Semi-Automatic Scribing Machine for 4-inch Wafers
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    Heating in vacuum or an oxidizing atmosphere-GV Series

    GV Series models provide pinpoint infrared beam irradiation to enable rapid non-contact heating of the sample only. They can be used with samples placed in various atmospheres such as ultra-high vacuum or gas flows, and can be easily connected to vacuum systems and analysis systems.

    Features
    1.High-speed heating
    2.Clean heating
    3.Localized heating
    4.Freely connectable
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    Heating in atmosphere-GA Series

    Models that irradiate and heat the sample with an infrared beam emitted from the tip of a quartz rod.

    Features
    1.High-speed heating
    2.360 degrees
    3.Pinpoint-heating
    4.from 100 V power
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    Temperature control devices

    These temperature controllers are ideal for use with infrared heating systems and electric furnaces. The wide model lineup ranges from advanced-function programmed temperature controllers to low-cost constant-value temperature controllers.
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    Manostar Switch- MS99C

    Low differential pressure switches are used to monitor and control this type of air movement.
    Product Line 
    MS99/MS99S/MS61A-RA
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    DES LINE

    エミネントスプレイ技術(特許取得)により均一性の高いエッチング精度を誇るDESラインです。薄物基板の安定搬送やRoll to Rollにも対応。
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    Air Floating Type Slit Coter

    Features
    1.High precision discharge pump
    2.High precision nozzle
    3.Applicable to high speed coating
    4.Applicable to transfer robot
    5.Safety cover with lock mechanism
    6.Nozzle tip management unit
    7.Automatic supply sysem of coationg liquid and cleaning liquid
    8.Reduce comtact damage of substrate backside by air floating
    9.No static electricity problem by air floating
    10.Applicable to high speed throughput by continuous substrate input
    11.Package deal with vacuum chamber dryer
    12.Many delivery records
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    Gantry Slide Slit Coater

    Features
    1.High precision discharge pump
    2.High precision nozzle
    3.Applicable to high speed coating
    4.Applicable to transfer robot
    5.Safety cover with lock mechanism
    6.Nozzle tip management unit
    7.Automatic supply sysem of coationg liquid and cleaning liquid
    8.Package deal with vacuum chamber dryer